A piezoelectric thin-film piezoelectric material and manufacturing method of piezoelectric thin film

Abstract

A piezoelectric thin film containing an aluminum nitride thin film (3) containing a Seltenerdendelement, wherein the rare earth element is scandium, and the content of scandium in the range of 10 atomic% to 50 atomic% in the assumption that the ratio of aluminum and scandium is defined in that the total amount of scandium and aluminum atoms in the aluminum nitride thin film (3) is 100 atomic%.