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The Operation Principle and Methods and Criterion of Quality Assurance (QA) for Excimer Laser
Methods and parameter criterion of quality assurance (QA) for excimer laser are investigated and certain degree of universal significance are available for reference.
Abstract
Objective: To investigate methods and parameter criterion of quality assurance (QA) for excimer laser. Methods: Analyze the operation principle of excimer laser and propose the methods of QA. Then conduct QA detection according to the methods on Scan-195 excimer laser before and after maintenance. Results: Comparing the results of QA detection in different performance status of laser device, propose parameter criterion for every variety of QA detection. Conclusions: The methods of QA and parameters criterion having certain degree of universal significance are available for reference.