Method and apparatus for detecting defects in an object

Abstract

A method for detecting defects (22) in an object (20) comprising the steps of local illuminating (10) of the object (20) by irradiating light (50) of a wavelength to which the object (20) is transparent, detecting (12) multiple reflected components of the irradiated light (50) with at least partial prevention of the detection directly of transmitted portions (48) of the irradiated light and at least partially avoid the detection simply reflected components (53a, 53b) of the irradiated light (50) and identifying (14) of defects (22) by evaluating differences in intensity in the detected amounts of the irradiated light (50) and apparatus for carrying out the method.