Polishing piezoelectric material
1 Citations•2007•
제프리 비르크마이어, 빌 안드레아스, 첸 젠팡
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Abstract
Devices having an actuator with polished piezoelectric material are described. Methods of forming a polished piezoelectric material include bonding a block of fired piezoelectric material onto a substrate and chemical mechanically polishing the block of fired piezoelectric material. The polished surface of the block of fired piezoelectric material can then be bonded to a device layer to form an actuator.