An aluminum electrode, an aluminum electrode and an electronic device

Abstract

The present invention contemplates an aluminum electrode, an electronic device and a method of forming the aluminum electrode. According to one aspect of the aluminum electrode of the present invention, comprising: a bottom layer made of molybdenum; a top layer made of molybdenum; and the aluminum layer is located between the bottom and top, wherein the bottom layer, the top layer and the aluminum layer is formed at a temperature of 120 deg.] C of. An aluminum electrode according to the present embodiment of the invention, rat gnawing phenomena can be eliminated. According to another aspect of the present invention, the aluminum electrodes, comprising: a bottom layer made of a nitride of a metal or a metal alloy; a top layer made of molybdenum; and the aluminum layer is located between the bottom and top, wherein the bottom layer, the top layer and the aluminum layer is It is formed at a temperature of 120 ℃. The aluminum electrode according to another embodiment of the present invention, which eliminates rat gnawing phenomena, but also to eliminate the phenomenon of side etching, and further preferably also the angle formed by controlling the nitrogen content.