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The paper presents the calculation results of the coplanar waveguide geometry using the method of conformal mapping and computerized simulation with COMSOL Multiphysics software. Ferromagnetic FeNi/Cu/FeNi magneto-sensitive elements are fabricated in one cycle with the coplanar waveguide which conveys drive signals. Magnetodynamics of the obtained film structures is studied within the frequency range of 1–20 GHz. It is shown that the main parameters of ferromagnetic resonance can be found for the thin film structures on the coplanar waveguide.