Highly sensitive Co3O4 nanoparticles/MEMS NO2 gas sensor with the adsorption of the Au nanoparticles
106 Citations•2020•
Ting‐Jen Hsueh, Song-Sing Wu
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Abstract
This study produces Co3O4 nanoparticles (NPs) using ultrasonic wave grinding technology. The experimental results show that the average diameter of Co3O4-NPs is about 6 nm. Au nanoparticles are adsorbed onto the surface of Co3O4-NPs and integrated with a MEMS structure to form a Au/Co3O4-NPs/MEMS NO2 gas sensor. The diameter of Au nanoparticle is approximately 1 nm. For a 100-ppb NO2 gas concentration, an Au/Co3O4-NPs/MEMS gas sensor has the greatest sensor response and has a higher sensitivity to NO2 than other gases (SO2, NH3, CO, CO2) when NO2 gas is introduced at 10 ppm and at the optimal operating temperature of 136 ℃.