Ultrasound transducer for distance measurements
Published 22 November 2002
M. Hornung, Oliver Brand, O. Paul, H. Baltes
Citations10
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Abstract
We report on optimized micromachined silicon membrane resonators for ultrasound based proximity sensing and distance measurement. The dependence of the ultrasound generation efficiency on the dimensions of the ultrasound transducer is systematically investigated. Our experimental results are supported with reliable numerical simulations to calculate the optimal resonator geometry. It is found that membranes with smaller area generate larger sound pressure.
Keywords
EngineeringPhysics and Astronomy
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