Miniature high current metal ion source
Applied Physics LettersPublished 20 October 1986Open access
I.G. Brown, James E. Galvin, R.A. MacGill, R. T. Wright
Citations101
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Abstract
A small, simple ion source for the production of high brightness beams of metal ions is described. A metal vapor vacuum arc discharge is used to establish the high density plasma from which the ion beam is extracted. The source is finger sized, and can produce pulsed metal ion beams with current up to the 10-mA range.
Keywords
EngineeringPhysics and Astronomy
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