Temperature, humidity and gas sensors integrated on plastic foil for low power applications
Sensors and Actuators B ChemicalPublished 25 April 2009Open access
A. Oprea, J. Courbat, Nicolae Bârsan, D. Briand, Ν. F. de Rooij, Udo Weimar
Citations152
Generate an AI Snapshot to get a quick, structured summary of this paper.
Study Snapshot
ObjectiveStudy objective
MethodsResearch methodology
PopulationPopulation studied
Sample sizeSample sizes
OutcomesStudy outcomes here
ResultsStudy results comes here
LimitationsResearch study limitations comes here
A concise AI-generated summary of the paper will appear here once you click Generate AI Snapshot.
Abstract
Temperature, gas and humidity resistive/capacitive sensors on plastic substrates, suitable for mobile applications, like smart RFID tags, have been produced and investigated. The sensor concept is providing simple, versatile and low power solutions for temperature, humidity and gas detection. The device structure was devised together with the data evaluation strategies based on the latest generation ΣΔ analog (resistance and capacitance) to digital converters. The possibility of developing gas sensors on humidity sensitive substrates, having temperature corrected responses is demonstrated. The proposed sensor is aimed to evolve towards “flexible and full plastic” implementations.
Keywords
EngineeringChemical Engineering
Understanding Delta‐Sigma Data Converters
1,935 Citations2017Richard Schreier, Shanthi Pavan +1 more
Sensors and ActuatorsHumidity sensors: Principles and applications
615 Citations1986Noboru Yamazoe, Yasuhiro Shimizu
NatureSmart single-chip gas sensor microsystem
614 Citations2001Christoph Hagleitner, Andreas Hierlemann +5 more
This work combines several of these developments to fabricate a smart single-chip chemical microsensor system that incorporates three different transducers (mass-sensitive, capacitive and calorimetric), all of which rely on sensitive polymeric layers to detect airborne volatile organic compounds.
Sensors and Actuators B ChemicalSolubility interactions and the design of chemically selective sorbent coatings for chemical sensors and arrays
425 Citations1991Jay W. Grate, Michael H. Abraham
Analytical ChemistryElectropolymerized Molecularly Imprinted Polymers as Receptor Layers in Capacitive Chemical Sensors
267 Citations1999Tatiana L. Panasyuk, Vladimir M. Mirsky +2 more
Sensors and Actuators A PhysicalApplying autonomous sensor systems in logistics—Combining sensor networks, RFIDs and software agents
200 Citations2006Reiner Jedermann, Christian Behrens +2 more
A miniaturized high-resolution gas chromatography is under construction, which autonomously configures itself to a product specific supervision task based on data scanned by an RFID reader during freight loading.
Lecture notes in computer scienceA Wirelessly-Powered Platform for Sensing and Computation
200 Citations2006Joshua R. Smith, Alanson P. Sample +3 more
This paper reports the first fully programmable computing platform that can operate using power transmitted from a long-range (UHF) RFID Reader and communicate arbitrary, multi-bit data in response to a single RFID reader poll event.
Sensors and Actuators B ChemicalMolecular imprinting strategy for solvent molecules and its application for QCM-based VOC vapor sensing
173 Citations2005Masanobu Matsuguchi, Toshiyuki Uno
IEEE Journal of Solid-State CircuitsCMOS single-chip gas detection system comprising capacitive, calorimetric and mass-sensitive microsensors
147 Citations2002Christoph Hagleitner, D. Lange +3 more
A 5.1μW RFID tag chip integrated with sensors for wireless environmental monitoring
142 Citations2005Namjun Cho, Seong-Jun Song +3 more
Wireless Communications and Mobile ComputingRadio frequency identification: technologies, applications, and research issues
139 Citations2006Yang Xiao, Senhua Yu +4 more
This paper provides a technology survey of RFID systems and various RFID applications, and discusses five critical research issues: cost control, energy efficiency, privacy issue, multiple readers' interference, and security issue.
Analytical ChemistryMultianalyte Chemical Identification and Quantitation Using a Single Radio Frequency Identification Sensor
133 Citations2006Radislav A. Potyrailo, William G. Morris
An approach for multianalyte chemical identification and quantitation using a single conventional radio frequency identification (RFID) tag that has been adapted for chemical sensing and achieving parts-per-billion vapor detection limits in air is demonstrated.
Sensors and Actuators B ChemicalOptimization of the geometry of gas-sensitive interdigital capacitors
120 Citations1991H.-E. Endres, S. Drost
Sensors and Actuators B ChemicalCapacitive humidity sensors on flexible RFID labels
116 Citations2007A. Oprea, Nicolae Bârsan +4 more
Sensors and Actuators B ChemicalDielectric response of interdigital chemocapacitors: The role of the sensitive layer thickness
112 Citations2005Rui Igreja, C.J. Dias
Assembly AutomationAn introduction to radio frequency identification (RFID) methods and solutions
102 Citations2006Paul G. Ranky
Some of the most important engineering, and information systems management principles and challenges radio frequency identification (RFID) researchers, implementers and users should keep in mind when developing such systems, and/or planning for such applications are introduced.
Sensors and Actuators B ChemicalAn RFID reader with onboard sensing capability for monitoring fruit quality
101 Citations2007Alexander Vergara, Eduard Llobet +8 more
An RFID reader with onboard micro-machined metal oxide gas sensors aimed at monitoring climacteric fruit during transport and vending is developed and it is shown that the reader could work as an alarm level monitor able to assess the conservation stage of apples.
Sensors and Actuators B ChemicalCharacterization of polymers for a capacitive-type humidity sensor based on water sorption behavior
96 Citations1998Masanobu Matsuguchi, Shōji Umeda +2 more
Analytical ChemistryTuning Sensitivity and Selectivity of Complementary Metal Oxide Semiconductor-Based Capacitive Chemical Microsensors
92 Citations2004A. Kummer, Andreas Hierlemann +1 more
New details on selectivity and sensitivity of fully integrated CMOS-based capacitive chemical microsensor systems are revealed, and experimentally determined sensitivities qualitatively and quantitatively coincide with the calculated values implying understanding of the sensing mechanism.
Sensors and Actuators B ChemicalStability and reliability of capacitive-type relative humidity sensors using crosslinked polyimide films
87 Citations1998Masanobu Matsuguchi, Takaaki Kuroiwa +4 more
Analytical ChemistrySelective Vapor Sorption by Polymers and Cavitands on Acoustic Wave Sensors: Is This Molecular Recognition?
85 Citations1996Jay W. Grate, Samuel J. Patrash +2 more
Selectivity patterns for the sorption of organic vapors from the gas phase into cavitand monolayers on acoustic wave sensors are very similar to those seen for sorption by amorphous polymers, demonstrating that the vapor/cavitand selectivity patterns are determined primarily by solubility interactions.
Sensors and Actuators B ChemicalCharacterization of silicon nanoporous pillar array as room-temperature capacitive ethanol gas sensor
66 Citations2006Xinjian Li, Shao Jun Chen +1 more
Sensors and Actuators B ChemicalCapacitive sensors in CMOS technology with polymer coating
51 Citations1995C. Cornila, Andreas Hierlemann +6 more
Sensors and Actuators A PhysicalGeneric architectures and design methods for autonomous sensors
45 Citations2006Wouter Bracke, Patrick Merken +2 more
This paper presents a generic architecture for sensor front-ends using the modular design methodology, which provides a flexible way to build a complete sensor interface out of configurable blocks.
Microsystem TechnologiesUltra-low-power components for an RFID Tag with physical and chemical sensors
43 Citations2007Stefano Zampolli, Ivan Elmi +9 more
In this work the development and optimization of the main components for a multisensing flexible Tag with RFID communication capabilities and integrated physical and chemical sensors for logistic datalogging applications will be reported.
Analytical ChemistryDetection and Discrimination Capabilities of a Multitransducer Single-Chip Gas Sensor System
39 Citations2006Petra Kurzawski, Christoph Hagleitner +1 more
The performance of a single-chip, three-transducer, complementary metal oxide semiconductor gas sensor microsystem has been thoroughly evaluated and represents a body of orthogonal data that can serve as input to appropriate signal processing and pattern recognition techniques to address issues such as the quantification of analytes in mixtures.
TRANSDUCERS 2003 - The 12th International Conference on Solid-State Sensors, Actuators and Microsystems
39 Citations2003H Tonka, H Hoanga +8 more
Analytical ChemistryTransient Signal Analysis Using Complementary Metal Oxide Semiconductor Capacitive Chemical Microsensors
34 Citations2005A. Kummer, Thomas P. Burg +1 more
The analysis of mixtures of analytes with similar chemical behavior by means of analyzing the response profile of single-exposure steps or by applying a series of decreasingly long alternating target gas exposure and carrier gas exposure steps has been performed.
IEEE Sensors JournalConfigurable electrodes for capacitive-type sensors and chemical sensors
33 Citations2006A. Kummer, Andreas Hierlemann
Sensors and Actuators B ChemicalMonolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes
32 Citations2007Y. Li, C. Vančura +7 more
Sensors and Actuators B ChemicalCapacitive-type chemical sensors using thin silicon/polymer bimorph membranes
27 Citations2004S. Chatzandroulis, E. Tegou +3 more
Sensors and Actuators B ChemicalA novel readout technique for capacitive gas sensors
22 Citations1990U. Schoeneberg, B.J. Hosticka +2 more
A novel readout technique for capactive gas sensors that uses periodically operated analog switches together with capacitors and operational amplifiers that is fully compatible with digital circuits and offers the possibility of cancelling out offset and cross sensitivity.
Integrated Temperature, Humidity and Gas Sensors on Flexible Substrates for Low-Power Applications
18 Citations2007A. Oprea, Nicolae Bârsan +4 more
Sensors and Actuators B ChemicalA gas sensor system with dielectric and mass sensors
16 Citations1992H.-E. Endres, L.D. Mickle +3 more
Microelectronic EngineeringA lithographic polymer process sequence for chemical sensing arrays
14 Citations2006Μαρία Κιτσαρά, D. Goustouridis +3 more
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems ConferenceWirelessly Powered Sensor Transponder for UHF RFID
12 Citations2007Pekka Pursula, Jouko Marjonen +2 more
A transponder for UHF RFID with sensor interface for external capacitive sensors is described and wireless measurement of capacitance is demonstrated at a distance of 30 cm with 0.5 W erp transmission power.
Sensors and Actuators B ChemicalCapacitive-type gas sensors combining silicon semiconductor and NaNO2-based solid electrolyte for NO2 detection
10 Citations2005Cyrus Zamani, Kengo Shimanoe +1 more
Journal of Applied Polymer ScienceCompetitive sorption of water vapor and CO<sub>2</sub> in photocrosslinked PVCA film for a capacitive‐type humidity sensor
6 Citations2001Masanobu Matsuguchi, Nozomi Maeda +1 more
Parylene Micro-Membrane Capacitive Bio/Chemical Sensor
1 Citations2005Srinath Satyanarayana, Daniel T. McCormick +1 more
A novel parylene micro-membrane surface stress sensor that exploits the low mechanical stiffness of polymers and addresses the above issues is demonstrated.